PPE密封214-G67P產(chǎn)品介紹
描述
一種半透明米色化合物，具有半結(jié)晶的全氟聚合物納米填料，專門為滿足半導(dǎo)體和生物分析行業(yè)的需求而開發(fā)。與基于氟的化學(xué)物兼容，普遍適用于包括光刻、等離子體、PVD、CVD、蝕刻、剝離和清洗在內(nèi)的濕法和干法半導(dǎo)體工藝。
Perlast? G67P結(jié)合了全氟化聚合物骨架、全氟化納米填料系統(tǒng)（無無機(jī)填料）和高度氟化的交聯(lián)工藝，從而形成了具有無與倫比純度和化學(xué)耐受性的全氟彈性體。
Perlast? G67P的壓縮模量顯著低于傳統(tǒng)的全氟彈性體，使其具有高度的柔順性。因此，在給定的壓縮下，它表現(xiàn)出低反應(yīng)力，這導(dǎo)致對(duì)密封件的應(yīng)力較小，從而延長(zhǎng)了使用壽命。
關(guān)鍵屬性
極其純凈 - 不含可能導(dǎo)致顆?；瘑栴}的無機(jī)填料。
優(yōu)異的化學(xué)和溫度耐受性。
優(yōu)異的機(jī)械性能。
極低的放氣特性，使其非常適合真空密封應(yīng)用。
高密封效率。
高材料柔順性，減少表面滲透。
降低的首片效應(yīng)。
降低總體擁有成本。
典型應(yīng)用
動(dòng)態(tài)密封 - 閘閥、門密封、擺動(dòng)閥、ISO閥、粘接門和唇形密封。
靜態(tài)密封 - O形圈、主體密封、腔室蓋密封、陰極組件密封、靜電卡盤密封和法蘭配件。
晶圓處理產(chǎn)品 - 末端執(zhí)行器墊和真空吸盤
適用于：
濕法和干法半導(dǎo)體工藝，包括：
光刻
PVD
CVD
蝕刻
剝離
清洗
激光/光學(xué)設(shè)備
此系列中的其他材料
Perlast G74P（超純半透明）
Perlast G75H（超純白色）
Description
A translucent beige compound with semi-crystalline perfluoropolymer nano-filler, specially developed to meet the demands of the semiconductor and bio-analytical industries. Compatible with fluorine based chemistries and universally suitable for both wet and dry semiconductor processes including Lithography, Plasma, PVD, CVD, Etch, Stripping and Cleaning.
Perlast? G67P combines a fully fluorinated polymer backbone, a fully fluorinated nano-filler system (no inorganic fillers) and a highly fluorinated cross-linking process, which results in a perfluoroelastomer with unrivalled purity and chemical resistance.
Perlast? G67P has a significantly lower compressive modulus than traditional perfluoroelastomers, making it highly compliant. So for a given compression, it exhibits a low reaction force, this results in lower stress on the seal, which leads to longer life expectancy.
Key Attributes
Exceptionally pure - does not contain any inorganic fillers which may cause particulation problems.
Excellent chemical and temperature resistance.
Excellent mechanical properties.
Extremely low out-gassing properties making it ideal for Vacuum sealing applications.
High sealing efficiency.
High material compliance reduces surface permeation.
Reduced first wafer effect.
Lower cost of ownership.
Typical Applications
Dynamic seals - gate valves, door seals, pendulum valves, ISO valves, bonded gates and lip seals.
Static seals - O-rings, body seals, chamber lid seals, cathode Assembly seals, electro-static-chuck seals and flange fittings.
Wafer-handling products – end effector pads & vacuum suction pads
Suitable for use in:
Wet and dry semiconductor processes including:-
- Lithography
- PVD
- CVD
- Etch
- Stripping
- Cleaning
Laser/optical equipment
Other materials in this range
Perlast G74P (ultra-pure translucent)
Perlast G75H (ultra-pure white)
PPE配件其他常用型號(hào)：
PPE 214-G67P
PPE SEAL NEW + ORIGINAL+ ONE YEAR WARRANTY
愛澤工業(yè)成立于2010年，定位于向制造工業(yè)提供高端制造技術(shù)和設(shè)備。代理經(jīng)營(yíng)世界優(yōu)質(zhì)的電氣自動(dòng)化、機(jī)械與傳動(dòng)、流體控制、儀器儀表、工具等產(chǎn)品。作為電氣，液壓以及氣動(dòng)解決方案的合作伙伴，我們利用我們的全球協(xié)作團(tuán)隊(duì)，為客戶提供先進(jìn)解決方案，市場(chǎng)知識(shí)以及相關(guān)增值服務(wù)來幫助優(yōu)化客戶的工作效率，提高可靠性和安全性，致力于成為工業(yè)產(chǎn)品和解決方案的優(yōu)質(zhì)渠道。
如果有任何關(guān)于PPE密封214-G67P的疑問，請(qǐng)隨時(shí)與我們溝通（021-31006702）。我們將盡全力解決您的問題。
If you have any question for PPE products, please feel free to dial 0086-21-3100 6702/ send request email to sales@ize-industries.com / browse our website:jjxdch.cn.
PPE密封214-G67P介紹
